Monolithic 3D integration of tantalum pentoxide nonlinear photonics

Nature, Published online: 15 April 2026; doi:10.1038/s41586-026-10379-w Monolithic three-dimensional (3D) integration of tantalum pentoxide on a lithium niobate substrate enables scalable, multifunctional photonic systems and the incorporation of nonlinear optics directly into existing and emerging photonics infrastructure.
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Monolithic 3D integration of tantalum pentoxide nonlinear photonics


